The facility provides nanofabrication, analytical instrumentation, materials characterization and process-development laboratories for students, faculty and industrial researchers.
Class 100 clean room; class 10,000 clean room; CM-200 200 kV Transmission Electron Microscope (TEM) with Oxford Energy Dissipation Spectrum (EDS); JEOL 6330F Field Emission Scanning Electron Microscopy (FEG-SEM) with EDS; JEOL 35CF Scanning Electron Microscope (SEM) with EDS; Siemens 500D X-ray Diffractometer (XRD); Atomic force microscope (AFM); • E-beam lithography system with Nabity controller ; Siemens 5000D X-ray Diffractometer; Differential Scanning Calorimeter; pocket e-beam deposition system; Dynamic Mechanical Analyzer; Complete metallography facility; Theta Dilatometer Analyzer; Electropolishing and etching; Marsh Reactive Ion Etchers; Habraline 500 contact mask aligner; Ellipsometer; Photoresist spinner and dryers; laser printer; etc.